Sana M, Saleem U, Farooq M, Qamar A, A Bhutta MM, Zafar S. Identification of Failure Modes on Electrostatic Chuck through Reliability Centered Maintenance: A Case Study: Identification of Failure Modes on ESC through RCM. PPASA [Internet]. 2021 Apr. 2 [cited 2024 Nov. 8];55(2):21-32. Available from: https://ppaspk.org/index.php/PPAS-A/article/view/168