SANA, M. .; SALEEM, U. .; FAROOQ, M. .; QAMAR, A. .; A BHUTTA, M. M. .; ZAFAR, S. . Identification of Failure Modes on Electrostatic Chuck through Reliability Centered Maintenance: A Case Study: Identification of Failure Modes on ESC through RCM. Proceedings of the Pakistan Academy of Sciences: A. Physical and Computational Sciences, [S. l.], v. 55, n. 2, p. 21–32, 2021. Disponível em: https://ppaspk.org/index.php/PPAS-A/article/view/168. Acesso em: 8 nov. 2024.