Sana, M. . (2021) “Identification of Failure Modes on Electrostatic Chuck through Reliability Centered Maintenance: A Case Study: Identification of Failure Modes on ESC through RCM”, Proceedings of the Pakistan Academy of Sciences: A. Physical and Computational Sciences, 55(2), pp. 21–32. Available at: http://ppaspk.org/index.php/PPAS-A/article/view/168 (Accessed: 4 December 2025).