SANA, Mehroz; SALEEM, Umer; FAROOQ, Muhammad; QAMAR, Adnan; A BHUTTA, Muhammad Mehmood; ZAFAR, Saad. Identification of Failure Modes on Electrostatic Chuck through Reliability Centered Maintenance: A Case Study: Identification of Failure Modes on ESC through RCM. Proceedings of the Pakistan Academy of Sciences: A. Physical and Computational Sciences, [S. l.], v. 55, n. 2, p. 21–32, 2021. Disponível em: http://ppaspk.org/index.php/PPAS-A/article/view/168. Acesso em: 4 dec. 2025.